검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Predicted effect of shot noise on contact hole dimension in e-beam lithography Kruit P, Steenbrink S, Wieland M Journal of Vacuum Science & Technology B, 24(6), 2931, 2006 |
| 2 |
Local critical dimension variation from shot-noise related line edge roughness Kruit P, Steenbrink S Journal of Vacuum Science & Technology B, 23(6), 3033, 2005 |
| 3 |
Optimum dose for shot noise limited CD uniformity in electron-beam lithography Kruit P, Steenbrink S, Jager R, Wieland M Journal of Vacuum Science & Technology B, 22(6), 2948, 2004 |