검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Online Inference of Plasma Etch Uniformity Using in-Situ Ellipsometry Stefani J, Butler SW Journal of the Electrochemical Society, 141(5), 1387, 1994 |
| 2 |
Intelligent Model-Based Control-System Employing in-Situ Ellipsometry Butler SW, Stefani J, Sullivan M, Maung S, Barna G, Henck S Journal of Vacuum Science & Technology A, 12(4), 1984, 1994 |