화학공학소재연구정보센터
검색결과 : 12건
No. Article
1 A-site deficiency, phase purity and crystal structure in lanthanum strontium ferrite powders
Striker T, Ruud JA, Gao Y, Heward WJ, Steinbruchel C
Solid State Ionics, 178(21-22), 1326, 2007
2 Plasma etching of benzocyclobutene in CF4/O-2 and SF6/O-2 plasmas
Kim GS, Steinbruchel C
Journal of Vacuum Science & Technology A, 24(3), 424, 2006
3 TiN, TaN and WxN as diffusion barriers for Cu on SiO2: capacitance-voltage, leakage current, and triangular-voltage-sweep tests after bias temperature stress
Kizil H, Steinbruchel C
Thin Solid Films, 449(1-2), 158, 2004
4 Nucleation and growth of electrochemically deposited copper on TiN and copper from a Cu-NH3 bath
Graham L, Steinbruchel C, Duquette DJ
Journal of the Electrochemical Society, 149(8), C390, 2002
5 Analysis of Langmuir probe data: Analytical parametrization, and the importance of the end effect
Narasimhan G, Steinbruchel C
Journal of Vacuum Science & Technology A, 19(1), 376, 2001
6 Electrical behavior of Cu thin fluorinated PECVD oxide MIS capacitors
Mallikarjunan A, Murarka SP, Steinbruchel C, Kumar A, Bakhru H
Journal of the Electrochemical Society, 147(9), 3502, 2000
7 Parametrization of Laframboise's results for spherical and cylindrical Langmuir probes
Karamcheti A, Steinbruchel C
Journal of Vacuum Science & Technology A, 17(5), 3051, 1999
8 Nondestructive, Interferometric Method for Measuring the Thickness of a Silicon Membrane
Adee JM, Steinbruchel C
Thin Solid Films, 306(1), 171, 1997
9 Fine-Line Patterning of Parylene-N by Reactive Ion Etching for Application as an Interlayer Dielectric
Tacito RD, Steinbruchel C
Journal of the Electrochemical Society, 143(6), 1974, 1996
10 Patterning of Benzocyclobutene by Reactive Ion Etching
Tacito RD, Steinbruchel C
Journal of the Electrochemical Society, 143(8), 2695, 1996