검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Use of gas-phase ethanol to mitigate extreme UV/water oxidation of extreme UV optics Klebanoff LE, Malinowski ME, Clift WM, Steinhaus C, Grunow P Journal of Vacuum Science & Technology A, 22(2), 425, 2004 |
| 2 |
Radiation-induced protective carbon coating for extreme ultraviolet optics Klebanoff LE, Clift WM, Malinowski ME, Steinhaus C, Grunow P, Bajt S Journal of Vacuum Science & Technology B, 20(2), 696, 2002 |
| 3 |
Radio-frequency discharge cleaning of silicon-capped Mo/Si multilayer extreme ultraviolet optics Graham S, Steinhaus C, Clift M, Klebanoff L Journal of Vacuum Science & Technology B, 20(6), 2393, 2002 |