화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Analysis of time-dependent haze on silicon surfaces
Munter N, Kolbesen BO, Storm W, Muller T
Journal of the Electrochemical Society, 150(3), G192, 2003
2 Controlled deposition of organic contamination and removal with ozone-based cleanings
Claes M, De Gendt S, Kenens C, Conard T, Bender H, Storm W, Bauer T, Mertens P
Journal of the Electrochemical Society, 148(3), G118, 2001
3 1,6-diene complexes of palladium(0) and platinum(0): Highly reactive sources for the naked metals and [L-M-0] fragments
Krause J, Cestaric G, Haack KJ, Seevogel K, Storm W, Porschke KR
Journal of the American Chemical Society, 121(42), 9807, 1999
4 Surface processes occurring on TiSi2 and CoSi2 in fluorine-based plasmas : Afterglow of a NF3 plasma
Baklanov MR, Vanhaelemeersch S, Storm W, Vandervorst W, Maax K
Journal of Vacuum Science & Technology B, 16(1), 164, 1998
5 Surface Processes Occurring on TiSi2 and CoSi2 in Fluorine-Based Plasmas - Reactive Ion Etching in CF4/Chf3 Plasmas
Baklanov MR, Vanhaelemeersch S, Storm W, Kim YB, Vandervorst W, Maex K
Journal of Vacuum Science & Technology A, 15(6), 3005, 1997
6 Kinetics and Mechanism of the Etching of CoSi2 in HF-Based Solutions
Baklanov MR, Badmaeva IA, Donaton RA, Sveshnikova LL, Storm W, Maex K
Journal of the Electrochemical Society, 143(10), 3245, 1996
7 Analysis of Stoichiometry and Oxide-Growth of HF Treated GaAs(100) by X-Ray Photoelectron-Spectroscopy and Time-of-Flight Secondary-Ion Mass-Spectrometry
Storm W, Wolany D, Schroder F, Becker G, Burkhardt B, Wiedmann L
Journal of Vacuum Science & Technology B, 12(1), 147, 1994