화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Arrays of high-Q high stability ultrahigh-frequency resonators for chemical/biological sensors
Kubena RL, Chang DT, Stratton FP, Joyce RJ, Hsu TY, Lim MK, M'Closkey RT
Journal of Vacuum Science & Technology B, 23(6), 2979, 2005
2 New miniaturized tunneling-based gyro for inertial measurement applications
Kubena RL, Vickers-Kirby DJ, Joyce RJ, Stratton FP
Journal of Vacuum Science & Technology B, 17(6), 2948, 1999
3 Microelectromechanical tunneling sensor fabrication and post-processing characterization using focused ion beams
Stratton FP, Kubena RL, McNulty HH, Joyce RJ, Vajo J
Journal of Vacuum Science & Technology B, 16(4), 2449, 1998
4 A New High-Performance Surface-Micromachined Tunneling Accelerometer Fabricated Using Nanolithography
Kubena RL, Atkinson GM, Robinson WP, Stratton FP
Journal of Vacuum Science & Technology B, 14(6), 4029, 1996