화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Power spectral densities: A multiple technique study of different Si wafer surfaces
Marx E, Malik IJ, Strausser YE, Bristow T, Poduje N, Stover JC
Journal of Vacuum Science & Technology B, 20(1), 31, 2002
2 Characterization of the Low-Pressure Chemical-Vapor-Deposition Grown Rugged Polysilicon Surface Using Atomic-Force Microscopy
Strausser YE, Schroth M, Sweeney JJ
Journal of Vacuum Science & Technology A, 15(3), 1007, 1997
3 Analysis of the Growth-Processes of Plasma-Enhanced Chemical-Vapor-Deposited Diamond Films from Co/H-2 and CH4/H-2 Mixtures Using Real-Time Spectroellipsometry
Lee J, Collins RW, Hong B, Messier R, Strausser YE
Journal of Vacuum Science & Technology A, 15(4), 1929, 1997