검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Real-time reactive ion etch metrology techniques to enable in situ response surface process characterization Klimecky P, Garvin C, Galarza CG, Stutzman BS, Khargonekar PP, Terry FL Journal of the Electrochemical Society, 148(1), C34, 2001 |
| 2 |
Two-channel spectroscopic reflectometry for in situ monitoring of blanket and patterned structures during reactive ion etching Stutzman BS, Huang HT, Terry FL Journal of Vacuum Science & Technology B, 18(6), 2785, 2000 |