검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Dopant Profile Control and Metrology Requirements for Sub-0.5 Mu-M Metal-Oxide-Semiconductor Field-Effect Transistors Duane M, Nunan P, Terbeek M, Subrahmanyan R Journal of Vacuum Science & Technology B, 14(1), 218, 1996 |
| 2 |
Papers from the 2nd International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors - Preface Subrahmanyan R Journal of Vacuum Science & Technology B, 12(1), 165, 1994 |