화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup
Gablech I, Svatos V, Caha O, Dubroka A, Pekarek J, Klempa J, Neuzil P, Schneider M, Sikola T
Thin Solid Films, 670, 105, 2019
2 Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source
Gablech I, Caha O, Svatos V, Pekarek J, Neuzil P, Sikola T
Thin Solid Films, 638, 57, 2017
3 Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide
Gablech I, Svatos V, Caha O, Hrabovsky M, Prasek J, Hubalek J, Sikola T
Journal of Materials Science, 51(7), 3329, 2016