검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Modelization of hafnium silicate chemical vapor deposition using tetrakis-diethyl-amino-hafnium and tetrakis-dimethyl-amino-silane Gros-Jean M, Bouvet P, Graoui H, Chu D, Larrnagnac D Thin Solid Films, 520(7), 2594, 2012 |
| 2 |
One-step growth of HfSiON films Xia B, Fisher ML, Stemper H, Misra A Thin Solid Films, 516(16), 5460, 2008 |