검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Audio-frequency glow discharge for plasma chemical vapor deposition from organic compounds of the carbon family Tyczkowski J Journal of Vacuum Science & Technology A, 17(2), 470, 1999 |
| 2 |
Deposition and properties of germanium/carbon films deposited from tetramethylgermanium in a parallel plate RF discharge Gazicki M, Ledzion R, Mazurczyk R, Pawlowski S Thin Solid Films, 322(1-2), 123, 1998 |
| 3 |
Thin-Films of Amorphous Germanium-Carbon Alloy Prepared by Radiofrequency Magnetron Sputtering Maruyama T, Akagi H Journal of the Electrochemical Society, 143(12), 4087, 1996 |
| 4 |
Correlations Between Process Parameters, Chemical-Structure and Electronic-Properties of Amorphous Hydrogenated Gexc1-X Films Prepared by Plasma-Enhanced Chemical-Vapor-Deposition in a 3-Electrode Reactor Tyczkowski J, Kazimierski P, Szymanowski H Thin Solid Films, 241(1-2), 291, 1994 |