검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Copper Decoration Followed by TEM Observation Defects in the Buried Oxides of SOI Substrates Itsumi M, Omura Y, Imai K, Ueki T, Akiya H, Tomita M, Yamawaki M Journal of the Electrochemical Society, 143(7), 2357, 1996 |
| 2 |
Morphology Change of Oxide Precipitates in Cz Silicon During 2-Step Annealing Sueoka K, Ikeda N, Yamamoto T, Kabayashi S Journal of the Electrochemical Society, 141(12), 3588, 1994 |