검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Mathematical Modeling for Chemical Vapor Deposition in a Single-Wafer Reactor: Application to Low-Pressure Deposition of Tungsten Park JH Korean Journal of Chemical Engineering, 19(3), 391, 2002 |
| 2 |
The Hydrogen Reduction of Wf6 - A Kinetic-Study Based on in-Situ Partial-Pressure Measurements Oosterlaken TG, Leusink GJ, Janssen GC, Radelaar S Journal of the Electrochemical Society, 143(5), 1668, 1996 |
| 3 |
Electron-Beam-Induced Etching of Resist with Water-Vapor as the Etching Medium Kohlmannvonplaten KT, Bruenger WH Journal of Vacuum Science & Technology B, 14(6), 4262, 1996 |