화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 An ellipsometric study of W thin films deposited on Si
Deineka AG, Tarasenko AA, Jastrabik L, Chvostova D, Bousek J
Thin Solid Films, 339(1-2), 216, 1999
2 C-Growth of DC-Sputtered Mo and W Thin-Films
Maoujoud M, Kons P, Jardinieroffergeld M, Bouillon F
Thin Solid Films, 238(1), 62, 1994
3 The Effect of Substrate Orientation on WSi2 Formation
Singh A, Khokle WS, Lal K
Thin Solid Films, 238(1), 155, 1994
4 Formation of Low-Pressure Chemically Vapor-Deposited W-Thin-Film on Silicon Dioxide for Gate Electrode Application
Sone JH, Kim SO, Kim KJ, Kim HS, Kim HJ
Thin Solid Films, 253(1-2), 377, 1994