1 |
Preparation of high laser-induced damage threshold Ta2O5 films Xu C, Yi P, Fan HL, Qi JW, Yang S, Qiang YH, Liu JT, Li DW Applied Surface Science, 309, 194, 2014 |
2 |
High temperature annealing effect on structure, optical property and laser-induced damage threshold of Ta2O5 films Xu C, Xiao QL, Maa JY, Jin YX, Shao JD, Fan ZX Applied Surface Science, 254(20), 6554, 2008 |
3 |
Synthesis and characterization of polyvinylpyrrolidine assisted tantalum pentoxide films Subramanian V, Ndiege N, Seebauer EG, Shannon MA, Masel RI Thin Solid Films, 516(15), 4784, 2008 |
4 |
Electrical characterization of deposited and oxidized Ta2Si as dielectric film for SiC metal-insulator-semiconductor structures. Perez A, Tournier D, Montserrat J, Mestres N, Sandiumenge F, Millan J Materials Science Forum, 457-460, 845, 2004 |
5 |
Leakage current mechanism of metal-Ta2O5-metal capacitors for memory device applications Lai BCM, Lee JYM Journal of the Electrochemical Society, 146(1), 266, 1999 |
6 |
Effects of vacuum and inert gas annealing of ultrathin tantalum pentoxide films on Si(100) Mao AY, Son KA, White JM, Kwong DL, Roberts DA, Vrtis RN Journal of Vacuum Science & Technology A, 17(3), 954, 1999 |
7 |
Dry oxidation resistance of ultrathin nitride films: Ordered and amorphous silicon nitride on Si(111) Wallace RM, Wei Y Journal of Vacuum Science & Technology B, 17(3), 970, 1999 |
8 |
Electrical characterisation of RF sputtered tantalum oxide films rapid thermal annealed with Ar, N-2, O-2 and N2O Choi WK, Tan LS, Lim JY, Pek SG Thin Solid Films, 343-344, 105, 1999 |
9 |
Influence of the forming electrolyte on the electrical properties of tantalum and niobium oxide films: an EIS comparative study Cavigliasso GE, Esplandiu MJ, Macagno VA Journal of Applied Electrochemistry, 28(11), 1213, 1998 |
10 |
Discrete beta-Ta2O5 crystallite formation in reactively sputtered amorphous thin films Beckage PJ, Knorr DB, Wu XM, Lu TM, Rymaszewski EJ Journal of Materials Science, 33(17), 4375, 1998 |