검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Damage characteristics of n-GaN thin film surfaces etched by ultraviolet light-assisted helium plasmas Kawakami R, Niibe M, Nakano Y, Shirahama T, Aoki K, Oba K, Takabatake M, Mukai T Thin Solid Films, 570, 81, 2014 |
| 2 |
Indium Tin Oxide Dry-Etching Using HBr Gas for Thin-Film-Transistor Liquid-Crystal Displays Takabatake M, Wakui Y, Konishi N Journal of the Electrochemical Society, 142(7), 2470, 1995 |