화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Fabrication of platinum particles by intense, femtosecond laser pulse irradiation of aqueous solution
Nakamura T, Takasaki K, Ito A, Sato S
Applied Surface Science, 255(24), 9630, 2009
2 Dry-Cleaning for Fe Contaminants on Si and SiO2 Surfaces with Silicon Chlorides
Sugino R, Okui Y, Shigeno M, Ohkubo S, Takasaki K, Ito T
Journal of the Electrochemical Society, 144(11), 3984, 1997
3 Identification of MOS Gate Dielectric-Breakdown Spot Using High Selectivity Cl Radical Etching Technique
Sugino R, Nakanishi T, Takasaki K, Ito T
Journal of the Electrochemical Society, 143(8), 2691, 1996
4 High-Precision X-Ray Reflectivity Study of Ultrathin SiO2 on Si
Awaji N, Sugita Y, Nakanishi T, Ohkubo S, Takasaki K, Komiya S
Journal of Vacuum Science & Technology A, 14(3), 971, 1996