검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-rate deposition of highly crystallized silicon films from inductively coupled plasma Kosku N, Kurisu F, Takegoshi M, Takahashi H, Miyazaki S Thin Solid Films, 435(1-2), 39, 2003 |
| No. | Article |
|---|---|
| 1 |
High-rate deposition of highly crystallized silicon films from inductively coupled plasma Kosku N, Kurisu F, Takegoshi M, Takahashi H, Miyazaki S Thin Solid Films, 435(1-2), 39, 2003 |