검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Optical properties of a multibeam column with a single-electron source Kamimura O, Tanimoto S, Ohta H, Nakayama Y, Sakakibara M, Sohda Y, Muraki M, Gotoh S, Hosoda M, Someda Y, Tamamori K, Hirose F, Nagae K, Kato K, Okunuki M Journal of Vacuum Science & Technology B, 25(1), 140, 2007 |
| 2 |
Inspection of all beams in multielectron beam system Tanimoto S, Sugaya M, Furukawa A, Sohda Y, Hosoda M, Someda Y, Muraki M, Tamamori K, Hirose F, Nagae K, Kato K Journal of Vacuum Science & Technology B, 25(2), 380, 2007 |