검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of ultrashallow dopant profiles using spreading resistance profiling Tan LS, Tan LCP, Leong MS, Mazur RG, Ye CW Journal of Vacuum Science & Technology B, 20(1), 483, 2002 |
| No. | Article |
|---|---|
| 1 |
Characterization of ultrashallow dopant profiles using spreading resistance profiling Tan LS, Tan LCP, Leong MS, Mazur RG, Ye CW Journal of Vacuum Science & Technology B, 20(1), 483, 2002 |