검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Self-assembled tungsten nanocrystals in high-k dielectric for nonvolatile memory application Samanta SK, Tan ZYL, Yoo WJ, Samudra G, Lee SJ, Bera LK, Balasubramanian N Journal of Vacuum Science & Technology B, 23(6), 2278, 2005 |
| 2 |
Investigation of etching properties of HfO based high-K dielectrics using inductively coupled plasma Chen JH, Yoo WJ, Tan ZYL, Wang YQ, Chan DSH Journal of Vacuum Science & Technology A, 22(4), 1552, 2004 |