검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
A novel measuring instrument for pyro-processes Chan KH, Goodfellow JH, Goh YR, Nasserzadeh V, Swithenbank J, Taylor DS Chemical Engineering Research & Design, 78(5), 783, 2000 |
| 2 |
Deposition rate dependence of step coverage of sputter deposited aluminum-(1.5%) copper films Taylor DS, Jain MK, Cale TS Journal of Vacuum Science & Technology A, 16(5), 3123, 1998 |