검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Adhesion studies of Ta/low-k (Black Diamond) interface using thermocompressive wafer bonding and four-point bend Teh WH, Tsang CF, Trigg A, Teoh KW, Kumar R, Balasubramanian N, Kwong DL, Ong SE, Malik F, Gan CL Journal of the Electrochemical Society, 153(9), G795, 2006 |
| 2 |
Etching control of benzocyclobutene in CF4/O-2 and SF6/O-2 plasmas with thick photoresist and titanium masks Liao EB, Teh WH, Teoh KW, Tay AAO, Feng HH, Kumar R Thin Solid Films, 504(1-2), 252, 2006 |