검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Synchrotron-Radiation Excited Etching of SiC Film Using Reactive Species Generated by a Microwave-Discharge Terakado SG, Ogura M, Suzuki S, Tanaka K Journal of Vacuum Science & Technology A, 12(2), 379, 1994 |
| No. | Article |
|---|---|
| 1 |
Synchrotron-Radiation Excited Etching of SiC Film Using Reactive Species Generated by a Microwave-Discharge Terakado SG, Ogura M, Suzuki S, Tanaka K Journal of Vacuum Science & Technology A, 12(2), 379, 1994 |