검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Dopant Profile Control and Metrology Requirements for Sub-0.5 Mu-M Metal-Oxide-Semiconductor Field-Effect Transistors Duane M, Nunan P, Terbeek M, Subrahmanyan R Journal of Vacuum Science & Technology B, 14(1), 218, 1996 |
| No. | Article |
|---|---|
| 1 |
Dopant Profile Control and Metrology Requirements for Sub-0.5 Mu-M Metal-Oxide-Semiconductor Field-Effect Transistors Duane M, Nunan P, Terbeek M, Subrahmanyan R Journal of Vacuum Science & Technology B, 14(1), 218, 1996 |