화학공학소재연구정보센터
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No. Article
1 Ga2O3 grown on GaAs by molecular beam epitaxy for metal oxide semiconductor field effect transistors
Holland M, Stanley CR, Reid W, Hill RJW, Moran DAJ, Thayne I, Paterson GW, Long AR
Journal of Vacuum Science & Technology B, 25(5), 1706, 2007
2 GdGaO: A gate dielectric for GaAs metal-oxide-semiconductor field-effect transistors
Holland M, Stanley CR, Reid W, Thayne I, Paterson GW, Long AR, Longo P, Scott J, Craven AJ, Gregory R
Journal of Vacuum Science & Technology B, 25(3), 1024, 2007
3 50 nm metamorphic GaAs and InPHEMTs
Thayne I, Elgaid K, Moran D, Cao X, Boyd E, McLelland H, Holland M, Thoms S, Stanley C
Thin Solid Films, 515(10), 4373, 2007
4 Low damage sputter deposition of tungsten for decanano compound semiconductor transistors
Cao X, Macintyre DS, Thoms S, Li X, Zhou H, Wilkinson CDW, Holland M, Donaldson L, McEwan F, McLellend H, Thayne I
Journal of Vacuum Science & Technology B, 23(6), 3138, 2005
5 Imprint lithography issues in the fabrication of high electron mobility transistors
Thoms S, Macintyre DS, Moran D, Thayne I
Journal of Vacuum Science & Technology B, 22(6), 3271, 2004
6 Nanoimprint lithography process optimization for the fabrication of high electron mobility transistors
Macintyre DS, Chen Y, Gourlay D, Boyd E, Moran D, Cao X, Elgaid K, Stanley CR, Thayne I, Thoms S
Journal of Vacuum Science & Technology B, 21(6), 2783, 2003
7 Fabrication of ultrashort T gates using a PMMA/LOR/UVIII resist stack
Chen Y, Macintyre DS, Cao X, Boyd E, Moran D, McLelland H, Holland M, Stanley CR, Thayne I, Thoms S
Journal of Vacuum Science & Technology B, 21(6), 3012, 2003
8 Fabrication of high electron mobility transistors with T-gates by nanoimprint lithography
Chen Y, Macintyre D, Boyd E, Moran D, Thayne I, Thoms S
Journal of Vacuum Science & Technology B, 20(6), 2887, 2002
9 Scaling of pseudomorphic high electron mobility transistors to decanano dimensions
Kalna K, Roy S, Asenov A, Elgaid K, Thayne I
Solid-State Electronics, 46(5), 631, 2002