화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 A Novel Technique for Characterizing the Surface Coverage of Thin-Film Chemical-Vapor-Deposition in Ultra-High-Aspect-Ratio Microstructures
Soave RJ, Tasker GW, Then AM, Mayer JW, Shachamdiamand Y
Journal of Vacuum Science & Technology A, 13(3), 1027, 1995
2 Fabrication of High-Aspect-Ratio Structures for Microchannel Plates
Shank SM, Soave RJ, Then AM, Tasker GW
Journal of Vacuum Science & Technology B, 13(6), 2736, 1995
3 High-Aspect-Ratio Dry-Etching for Microchannel Plates
Snider GL, Then AM, Seave RJ, Tasker GW
Journal of Vacuum Science & Technology B, 12(6), 3327, 1994