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Stochastic nonlinear model predictive control applied to a thin film deposition process under uncertainty Rasoulian S, Ricardez-Sandoval LA Chemical Engineering Science, 140, 90, 2016 |
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A robust nonlinear model predictive controller for a multiscale thin film deposition process Rasoulian S, Ricardez-Sandoval LA Chemical Engineering Science, 136, 38, 2015 |
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Porosity control in thin film solar cells Huang JQ, Orkoulas G, Christofides PD Chemical Engineering Science, 94, 44, 2013 |
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Comparison of growth mechanisms of silicon thin films prepared by HWCVD with PECVD Zhou YQ, Zhou BQ, Gu JH, Zhu MF, Liu FZ Thin Solid Films, 516(5), 564, 2008 |
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Deposition and structural characterization of poly-Si thin films on Al-coated glass substrates using hot-wire chemical vapor deposition Ebil O, Aparicio R, Hazra S, Birkmire RW, Sutter E Thin Solid Films, 430(1-2), 120, 2003 |
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Epitaxial growth of RuO2 thin films by metal-organic chemical vapor deposition Lu P, He S, Li FX, Jia QX Thin Solid Films, 340(1-2), 140, 1999 |