검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ultrashallow junctions formed by C coimplantation with spike plus submelt laser annealing Felch SB, Collart E, Parihar V, Thirupapuliyur S, Schreutelkamp R, Pawlak BJ, Hoffmann T, Severi S, Eyben P, Vandervorst W, Noda T Journal of Vacuum Science & Technology B, 26(1), 281, 2008 |