검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Process diagnostics and thickness metrology using in situ mass spectrometry for the chemical vapor deposition of W from H-2/WF6 Gougousi T, Xu YH, Kidder JN, Rubloff GW, Tilford CR Journal of Vacuum Science & Technology B, 18(3), 1352, 2000 |
| 2 |
Comparison of the Standards for High and Ultrahigh-Vacuum at 3 National Standards Laboratories Jousten K, Filippelli AR, Tilford CR, Redgrave FJ Journal of Vacuum Science & Technology A, 15(4), 2395, 1997 |
| 3 |
Comments on the Stability of Bayard-Alpert Ionization Gauges Tilford CR, Filippelli AR, Abbott PJ Journal of Vacuum Science & Technology A, 13(2), 485, 1995 |