검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
LPCVD Silicon-Rich Silicon-Nitride Films for Applications in Micromechanics, Studied with Statistical Experimental-Design Gardeniers JG, Tilmans HA, Visser CC Journal of Vacuum Science & Technology A, 14(5), 2879, 1996 |
| No. | Article |
|---|---|
| 1 |
LPCVD Silicon-Rich Silicon-Nitride Films for Applications in Micromechanics, Studied with Statistical Experimental-Design Gardeniers JG, Tilmans HA, Visser CC Journal of Vacuum Science & Technology A, 14(5), 2879, 1996 |