검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Optimization of an Electron-Cyclotron-Resonance Plasma Etch Process for N+ Polysilicon - HBr Process Chemistry Tipton GD, Blain MG, Westerfield PL, Trutna LS, Maxwell KL Journal of Vacuum Science & Technology B, 12(1), 416, 1994 |