검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effect of bias on the structure and properties of TiZrN thin films deposited by unbalanced magnetron sputtering Lin YW, Chen HA, Yu GP, Huang JH Thin Solid Films, 618, 13, 2016 |
| 2 |
Antibacterial activity and cell compatibility of TiZrN, TiZrCN, and TiZr-amorphous carbon coatings Huang HL, Chang YY, Liu JX, Tsai MT, Lai CH Thin Solid Films, 596, 111, 2015 |
| 3 |
Evaluation of the thermal stability of reactively sputtered (Ti, Zr)N-x nano-thin films as diffusion barriers between Cu and silicon Kuo YL, Lee C, Lin JC, Yen YW, Lee WH Thin Solid Films, 484(1-2), 265, 2005 |