검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Pulsed dc magnetron discharge for high-rate sputtering of thin films Musil J, Lestina J, Vlcek J, Tolg T Journal of Vacuum Science & Technology A, 19(2), 420, 2001 |
| No. | Article |
|---|---|
| 1 |
Pulsed dc magnetron discharge for high-rate sputtering of thin films Musil J, Lestina J, Vlcek J, Tolg T Journal of Vacuum Science & Technology A, 19(2), 420, 2001 |