검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Use of reflective and amorphous materials for dark field stepper alignment on silicon carbide substrates Mancini DP, Resnick DJ, Tompkins H, Moore KE Journal of Vacuum Science & Technology B, 20(2), 570, 2002 |
| 2 |
Nitrogen-doped plasma enhanced chemical vapor deposited (PECVD) amorphous carbon: processes and properties Smith SM, Voight SA, Tompkins H, Hooper A, Talin AA, Vella J Thin Solid Films, 398-399, 163, 2001 |