검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Gas temperature measurement in CF4, SF6, O-2, Cl-2, and HBr inductively coupled plasmas Cunge G, Ramos R, Vempaire D, Touzeau M, Neijbauer M, Sadeghi N Journal of Vacuum Science & Technology A, 27(3), 471, 2009 |
| 2 |
Experimental study of a radio-frequency Ionized Physical Vapour Deposition process: Contamination by the internal coil Imbert JC, de Poucques L, Boisse-Laporte C, Bretagne J, Hugon MC, Pagnon D, Pitach P, Teule-Gay L, Touzeau M Thin Solid Films, 516(15), 4700, 2008 |
| 3 |
Determination of titanium temperature and density in a magnetron vapor sputtering device assisted by two microwave coaxial excitation systems Leroy O, de Poucques L, Boisse-Laporte C, Ganciu M, Teule-Gay L, Touzeau M Journal of Vacuum Science & Technology A, 22(1), 192, 2004 |
| 4 |
Reactions of metastable argon atoms with molecular hydrogen at 300 and 80 K: Origin of the ultraviolet chemiluminescence Sadeghi N, Setser DW, Touzeau M Journal of Physical Chemistry A, 106(36), 8399, 2002 |