검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low temperature atomic layer deposition of high-k dielectric stacks for scaled metal-oxide-semiconductor devices Bethge O, Abermann S, Henkel C, Bertagnolli E Thin Solid Films, 517(18), 5543, 2009 |
| No. | Article |
|---|---|
| 1 |
Low temperature atomic layer deposition of high-k dielectric stacks for scaled metal-oxide-semiconductor devices Bethge O, Abermann S, Henkel C, Bertagnolli E Thin Solid Films, 517(18), 5543, 2009 |