검색결과 : 7건
| No. | Article |
|---|---|
| 1 |
Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy De Wolf P, Stephenson R, Trenkler T, Clarysse T, Hantschel T, Vandevorst W Journal of Vacuum Science & Technology B, 18(1), 361, 2000 |
| 2 |
Evaluating probes for "electrical" atomic force microscopy Trenkler T, Hantschel T, Stephenson R, De Wolf P, Vandervorst W, Hellemans L, Malave A, Buchel D, Oesterschulze E, Kulisch W, Niedermann P, Sulzbach T, Ohlsson O Journal of Vacuum Science & Technology B, 18(1), 418, 2000 |
| 3 |
Practicalities and limitations of scanning capacitance microscopy for routine integrated circuit characterization Stephenson R, De Wolf P, Trenkler T, Hantschel T, Clarysse T, Jansen P, Vandervorst W Journal of Vacuum Science & Technology B, 18(1), 555, 2000 |
| 4 |
New aspects of nanopotentiometry for complementary metal-oxide-semiconductor transistors Trenkler T, Stephenson R, Jansen P, Vandervorst W, Hellemans L Journal of Vacuum Science & Technology B, 18(1), 586, 2000 |
| 5 |
Two-dimensional profiling in silicon using conventional and electrochemical selective etching Trenkler T, Vandervorst W, Hellemans L Journal of Vacuum Science & Technology B, 16(1), 349, 1998 |
| 6 |
Nanopotentiometry : Local potential measurements in complementary metal-oxide-semiconductor transistors using atomic force microscopy Trenkler T, De Wolf P, Vandervorst W, Hellemans L Journal of Vacuum Science & Technology B, 16(1), 367, 1998 |
| 7 |
Epitaxial staircase structure for the calibration of electrical characterization techniques Clarysse T, Caymax M, De Wolf P, Trenkler T, Vandervorst W, McMurray JS, Kim J, Williams CC, Clark JG, Neubauer G Journal of Vacuum Science & Technology B, 16(1), 394, 1998 |