검색결과 : 1건
No. | Article |
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1 |
Structure and mechanical properties of Mo-N/Cu films produced by inductively coupled plasma reactive sputtering Kim JN, Park S, Kim T, Lee JJ Thin Solid Films, 519(20), 6876, 2011 |
No. | Article |
---|---|
1 |
Structure and mechanical properties of Mo-N/Cu films produced by inductively coupled plasma reactive sputtering Kim JN, Park S, Kim T, Lee JJ Thin Solid Films, 519(20), 6876, 2011 |