검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Highly conformal carbon-doped SiCN films by plasma-enhanced chemical vapor deposition with enhanced barrier properties Lee WJ, Choa YH Thin Solid Films, 657, 32, 2018 |
| 2 |
One-step growth of HfSiON films Xia B, Fisher ML, Stemper H, Misra A Thin Solid Films, 516(16), 5460, 2008 |