검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
CMP of ultra low-k material porous-polysilazane (PPSZ) for interconnect applications Chang TC, Tsai TM, Liu PT, Chen CW, Yan ST, Aoki H, Chang YC, Tseng T Thin Solid Films, 447, 524, 2004 |
| No. | Article |
|---|---|
| 1 |
CMP of ultra low-k material porous-polysilazane (PPSZ) for interconnect applications Chang TC, Tsai TM, Liu PT, Chen CW, Yan ST, Aoki H, Chang YC, Tseng T Thin Solid Films, 447, 524, 2004 |