검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Different effect of annealing temperature on resistivity for stoichiometric, W rich, and N rich tungsten nitride films Lin J, Tsukune A, Suzuki T, Yamada M Journal of Vacuum Science & Technology A, 17(3), 936, 1999 |
| 2 |
Conversion of tungsten nitride to pure tungsten Lin J, Tsukune A, Suzuki T, Yamada M Journal of Vacuum Science & Technology A, 16(2), 611, 1998 |
| 3 |
Stabilizing Dielectric-Constants of Fluorine-Doped SiO2-Films by N2O-Plasma Annealing Takeishi S, Kudoh H, Shinohara R, Tsukune A, Satoh Y, Harada H, Yamada M Journal of the Electrochemical Society, 143(1), 381, 1996 |
| 4 |
Thermally Deposited Amorphous-Silicon Mieno F, Sukegawa TS, Iizuka J, Miyata H, Nomura H, Tsukune A, Furumura Y Journal of the Electrochemical Society, 141(8), 2166, 1994 |