검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Preparation of SiNx and composite SiNx-TiN films from alkoxide solutions by liquid injection plasma CVD Shimada S, Tsukurimichi K Thin Solid Films, 419(1-2), 54, 2002 |
| No. | Article |
|---|---|
| 1 |
Preparation of SiNx and composite SiNx-TiN films from alkoxide solutions by liquid injection plasma CVD Shimada S, Tsukurimichi K Thin Solid Films, 419(1-2), 54, 2002 |