검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
3-Dimensional Equipment Modeling for Chemical-Vapor-Deposition Werner C, Ilg M, Uram K Journal of Vacuum Science & Technology A, 14(3), 1147, 1996 |
| No. | Article |
|---|---|
| 1 |
3-Dimensional Equipment Modeling for Chemical-Vapor-Deposition Werner C, Ilg M, Uram K Journal of Vacuum Science & Technology A, 14(3), 1147, 1996 |