검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Determination of Ti+-flux and Ar+-flux of ionized physical vapor deposition of titanium from multiscale model calibration with test structures Jacobs W, Kersch A, Ruf A, Urbansky N Journal of Vacuum Science & Technology A, 21(4), 922, 2003 |