검색결과 : 2건
No. | Article |
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1 |
Low-temperature epitaxial growth of cubic SiC thin films on Si(111) using supersonic molecular jet of single source precursors Boo JH, Ustin SA, Ho W Thin Solid Films, 343-344, 650, 1999 |
2 |
Supersonic jet epitaxy of single crystalline cubic SiC thin films on Si substrates from t-butyldimethylsilane Boo JH, Ustin SA, Ho W Thin Solid Films, 324(1-2), 124, 1998 |