검색결과 : 1건
No. | Article |
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1 |
Surface evolution and effect of V/III ratio modulation on etch-pit-density improvement of thin AlN templates on nano-patterned sapphire substrates by metalorganic chemical vapor deposition Wang TY, Tasi CT, Lin KY, Ou SL, Horng RH, Wuu DS Applied Surface Science, 455, 1123, 2018 |