검색결과 : 1건
No. | Article |
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1 |
The effects of RF plasma excitation frequency and doping gas on the deposition of polymorphous silicon thin films Suendo V, Kharchenko AV, Cabarrocas PRI Thin Solid Films, 451-52, 259, 2004 |
No. | Article |
---|---|
1 |
The effects of RF plasma excitation frequency and doping gas on the deposition of polymorphous silicon thin films Suendo V, Kharchenko AV, Cabarrocas PRI Thin Solid Films, 451-52, 259, 2004 |