검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Influence of the ion bombardment of O-2 plasmas on low-k materials Verdonck P, Samara V, Goodyear A, Ferchichi A, Van Besien E, Baklanov MR, Braithwaite N Thin Solid Films, 520(1), 464, 2011 |
| 2 |
Evaluations of intrinsic time dependent dielectric breakdown of dielectric copper diffusion barriers Zhao L, Lofrano M, Croes K, Van Besien E, Tokei Z, Wilson CJ, Degraeve R, Kauerauf T, Beyer GP, Claeys C Thin Solid Films, 520(1), 662, 2011 |